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Evapotranspiration (ET) is a relevant component of the surface moisture budget and is associated with different drivers. The interrelated drivers cause variations at daily to interannual timescales. This study uses structural equation modeling to diagnose the drivers over an ensemble of 45 high-latitude sites, each of which provides at least several years of in situ measurements, including latent heat fluxes derived from eddy covariance flux towers. The sites are grouped by vegetation type (tundra, forest) and the presence or absence of permafrost to determine how the relative importance of different drivers depends on land surface characteristics. Factor analysis is used to quantify the common variance among the variables, while a path analysis procedure is used to assess the independent contributions of different variables. The variability of ET at forest sites generally shows a stronger dependence on relative humidity, while ET at tundra sites is more temperature-limited than moisture-limited. The path analysis shows that ET has a stronger direct correlation with solar radiation than with any other measured variable. Wind speed has the largest independent contribution to ET variability. The independent contribution of solar radiation is smaller because solar radiation also affects ET through various other drivers. The independent contribution of wind speed is especially apparent at forest wetland sites. For both tundra and forest vegetation, temperature loads higher on the first factor when permafrost is present, implying that ET will become less sensitive to temperature as permafrost thaws.